IGS (Integrated Gas System)
IGS (Integrated Gas System)
Gas filter and pressure sensor for IGS.
- FIX/SIX Series:It have an assortment of ceramic element type(0.00015μm) and metal element type (0.0015μm) that have an excellent reputation as high filtration accuracy.
- FI/SI Series:This is the gas filter for IGS. We have a large assortment of ceramic gas filter and all metal gas filter that have an excellent reputation as high filtration accuracy and high corrosion resistance （filtration accuracy: 0.003μm, recommended flow rate: less than 10LPM to 120LPM）.
- PC Series:This is the pressure sensor for IGS. It has a features as high accuracy and high corrosion resistance, and it can measure a wide range of gauge and absolute pressure (output: 0 to 100mV、0 to 50mV 、4 to 20mA、0 to 5V）.
