Molecular flow
Molecular flow controller
Molecular flow controller (PMFC-100) with “Standard Conductance Element” (Separately sold parts) can introduce various gases (known controlled gas flow rate (very low flow rate)) into your vacuum chamber.
- PMFC-100 Series: Upstream pressure range ≦ 103kPa
Standard Conductance Element (Standard leak / Ultra-micro gas flow element)
Pureron's SCE series is the product which can introduce several gases with Molecular flow condition without interflow from the state of viscous flow into a vacuum chamber. This product can be replaced from conventional standard leaks (Permeation/Capillary).
- SCE Series: Molecular flow conductance 5x10-11 m3/s(N2 gas)~
